CoFeBX layers for MgO-based magnetic tunnel junction sensors with improved magnetoresistance and noise performance
نویسندگان
چکیده
Magnetoresistive sensors have been enthusiastically selected for applications requiring magnetic field detection with small footprint sensors. The optimisation of the sensor response includes using soft free layers, based on CoFeB and NiFe alloys. Here we report TMR noise performance magnetically saturated in-plane MTJ including CoFeBTa CoFeSiB films as layers (FL). Assessing magneto-crystalline anisotropy μ 0 H k values 2.1 0.7 mT in 2.5 (nm)/Ru 0.2/CoFeBTa 4 3/Ru 0.2/CoFeSiB compared to 1.7 2.5/Ru 0.2/NiFe 4, together an improved magnetoresistance 230% CoFeBSi comparing 170% (NiFe) superior characteristics, Hooge parameter α = 7 × 10 −11 μm 2 .
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2023
ISSN: ['2158-3226']
DOI: https://doi.org/10.1063/9.0000559